Samsung Electronics develops smart sensor system

According to news on December 26 , Korean media ETNews reported that Samsung Electronics is developing its own "smart sensor system" for the control and management of semiconductor processes. This new technology is expected to improve semiconductor yield and increase productivity.

One of the key points to improve semiconductor yield is to accurately control the uniformity and density of plasma in the semiconductor production process, and the "intelligent sensor system" is used to measure wafer plasma uniformity and accurately measure and manage etching, deposition and cleaning. Process performance is expected to improve semiconductor yield and production capacity.

Most of Samsung's existing wafer smart sensors are purchased from foreign manufacturers such as the United States, which costs a lot of money. The recent surge in demand for increased production has forced Samsung to turn to in-house research and reduce its dependence on foreign sensors.

Currently, Samsung Electronics has begun internal research and development of smart sensor systems, which are expected to be used in autonomous driving and artificial intelligence semiconductor manufacturing processes in the future. The project is understood to be ongoing in collaboration with relevant partners and academia.

In addition, the smart sensors being developed by Samsung Electronics are said to be ultra-small and will not have much impact on existing equipment space. This means that space utilization can also be improved.

Samsung Electronics also plans to gradually expand the development and application scope of smart sensors. The aim is to develop smart sensors and systems that can be used in a variety of semiconductor processes, not limited to plasmas.